Multiscale Fluidic Channels via Internal Oxidation and Oxide Etching of Self-Assembled Silicon-on-Nothing Structures
- 期刊名称Journal of Microelectromechanical Systems
- 作者Je, Jinsol; Song, Jungki; Lee, Bong Jae; Lee, Jungchul
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小1201.76KB
- 发表时间2019
- DOI10.1109/jmems.2019.2926378
- 页码1-4