[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Fluorine Saturated Yttrium (YF) Based Coatings for Advanced Semiconductor ULSI Manufacturing
Padron-Wells, Gabriel; VanOverloop, Michael; Yeo, Junghyeon; Abit, Avun; Finneran, Kevin; Mclaughlin, Lenore; Greuter, Ryan
- 作者Padron-Wells, Gabriel; VanOverloop, Michael; Yeo, Junghyeon; Abit, Avun; Finneran, Kevin; Mclaughlin, Lenore; Greuter, Ryan
- 文件大小1463.44KB
- 发表时间2019
- DOI10.1109/asmc.2019.8791799
- 页码1-6