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Numerical simulation of surface diffusion motion and its application in MEMS fabrication

Numerical simulation of surface diffusion motion and its application in MEMS fabrication

Zhang, Yujie; Zeng, Fan; Wong, Man; Xiang, Junping; Ye, Wenjing

期刊名称Journal of Physics: Conference Series
作者Zhang, Yujie; Zeng, Fan; Wong, Man; Xiang, Junping; Ye, Wenjing
卷第1303卷
印刷ISSN1742-6588
电子ISSN1742-6596
文件大小1091.57KB
发表时间2019-08
DOI10.1088/1742-6596/1303/1/012024

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