Doping ferroelectric hafnium oxide by in-situ precursor mixing
Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Czernohorsky, Malte; Wiatr, Maciej; Kolodinski, Sabine; Weinreich, Wenke
- 期刊名称ACS Applied Electronic Materials
- 作者Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Czernohorsky, Malte; Wiatr, Maciej; Kolodinski, Sabine; Weinreich, Wenke
- 印刷ISSN2637-6113
- 电子ISSN2637-6113
- 文件大小737.72KB
- 发表时间2019-11-12
- DOI10.1021/acsaelm.9b00591