Aging Effects of KOH+NH 2 OH Solution on the Etching Characteristics of Silicon
- 期刊名称ECS Journal of Solid State Science and Technology
- 作者Rao, Avvaru Venkata Narasimha; Pal, Prem; Pandey, Ashok Kumar; Swarnalatha, Veerla; Menon, P. Krishna; Tanaka, Hiroshi; Sato, Kazuo
- 卷第8卷
- 期第11期
- 印刷ISSN2162-8769
- 电子ISSN2162-8777
- 文件大小1833.98KB
- 发表时间2019
- DOI10.1149/2.0081911jss
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