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[IEEE 2019 16th International Multi-Conference on Systems, Signals & Devices (SSD) - Istanbul, Turkey (2019.3.21-2019.3.24)] 2019 16th International Multi-Conference on Systems, Signals & Devices (SSD) - Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer

[IEEE 2019 16th International Multi-Conference on Systems, Signals & Devices (SSD) - Istanbul, Turkey (2019.3.21-2019.3.24)] 2019 16th International Multi-Conference on Systems, Signals & Devices (SSD) - Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer

Ahmed, Aftab; Pandit, Shardul; Patkar, Rajul; Dixit, Pradeep; Baghini, Maryam Shojaei; Khlifi, Awatef; Tounsi, Fares; Mezghani, Brahim
  • 作者Ahmed, Aftab; Pandit, Shardul; Patkar, Rajul; Dixit, Pradeep; Baghini, Maryam Shojaei; Khlifi, Awatef; Tounsi, Fares; Mezghani, Brahim
  • 文件大小871.50KB
  • 发表时间2019
  • DOI10.1109/ssd.2019.8893246
  • 页码131-136
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