Application of a forevacuum plasma source of a focused electron beam for cutting quartz glass
Bakeev, I Yu; Klimov, A S; Oks, E M; Zenin, A A
- 期刊名称Journal of Physics: Conference Series
- 作者Bakeev, I Yu; Klimov, A S; Oks, E M; Zenin, A A
- 卷第1393卷
- 印刷ISSN1742-6588
- 电子ISSN1742-6596
- 文件大小1002.49KB
- 发表时间2019-11
- DOI10.1088/1742-6596/1393/1/012075