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Influence of Annealing Temperature on the Properties of ZnGa2O4 Thin Films by Magnetron Sputtering

Influence of Annealing Temperature on the Properties of ZnGa2O4 Thin Films by Magnetron Sputtering

Wang, Wei-Kai; Liu, Kuo-Feng; Tsai, Pi-Chuen; Xu, Yi-Jie; Huang, Shih-Yung
  • 期刊名称Coatings
  • 作者Wang, Wei-Kai; Liu, Kuo-Feng; Tsai, Pi-Chuen; Xu, Yi-Jie; Huang, Shih-Yung
  • 卷第9卷
  • 期第12期
  • 电子ISSN2079-6412
  • 文件大小3580.72KB
  • 发表时间2019-12-14
  • DOI10.3390/coatings9120859
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