Study of the bias voltage influence on the structure, texture and residual stresses in Ta coatings deposited on a copper substrate of inverted magnetron

Lenkovets, A S; Lozovan, A A; Betsofen, S Ya; Bespalov, A V; Grushin, I A; Ivanov, N A

期刊名称Journal of Physics: Conference Series
作者Lenkovets, A S; Lozovan, A A; Betsofen, S Ya; Bespalov, A V; Grushin, I A; Ivanov, N A
卷第1396卷
印刷ISSN1742-6588
电子ISSN1742-6596
文件大小893.88KB
发表时间2019-11
DOI10.1088/1742-6596/1396/1/012028

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