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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35µM CMOS MEMS Technology

[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35µM CMOS MEMS Technology

Xu, Wei; Wang, Xiaoyi; Mousa, Basant; Paszkiewicz, Maria; Lee, Yi-Kuen
  • 作者Xu, Wei; Wang, Xiaoyi; Mousa, Basant; Paszkiewicz, Maria; Lee, Yi-Kuen
  • 文件大小4191.21KB
  • 发表时间2019
  • DOI10.1109/transducers.2019.8808379
  • 页码1913-1916
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