[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A 0.1µM-Resoution Silicon Tactile Sensor with Precisely Designed Piezoresitve Sensing Structure
Nakashima, Tsubasa; Watatani, Kazuki; Terao, Kyohei; Shimokawa, Fusao; Takao, Hidekuni
- 作者Nakashima, Tsubasa; Watatani, Kazuki; Terao, Kyohei; Shimokawa, Fusao; Takao, Hidekuni
- 文件大小895.44KB
- 发表时间2019
- DOI10.1109/TRANSDUCERS.2019.8808467
- 页码1807-1810