Development of a fast atom beam gun for surface-activated bonding

Morisaki, Ryo; Hirai, Yuuki; Oka, Chiemi; Mizoshiri, Mizue; Yamazaki, Takahiro; Sakurai, Junpei; Hirai, Takami; Takahashi, Tomonori; Tsuji, Hiroyuki; Hata, Seiichi

期刊名称Precision Engineering
作者Morisaki, Ryo; Hirai, Yuuki; Oka, Chiemi; Mizoshiri, Mizue; Yamazaki, Takahiro; Sakurai, Junpei; Hirai, Takami; Takahashi, Tomonori; Tsuji, Hiroyuki; Hata, Seiichi
卷第62卷
印刷ISSN0141-6359
文件大小2048.76KB
发表时间2020-03
DOI10.1016/j.precisioneng.2019.11.006
页码106-112

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Development of a fast atom beam gun for surface-activated bonding