Investigations into surface topography of glass microfeatures formed by pulsed electrochemical discharge milling for microsystem applications
- 期刊名称Microsystem Technologies
- 作者Verma, Aman Kumar; Mishra, Dileep Kumar; Pawar, Karan; Dixit, Pradeep
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小3074.31KB
- 发表时间2020-2-5
- DOI10.1007/s00542-020-04770-4
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