Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction
- 期刊名称Nanomaterials
- 作者Lederer, Maximilian; Kämpfe, Thomas; Vogel, Norman; Utess, Dirk; Volkmann, Beate; Ali, Tarek; Olivo, Ricardo; Müller, Johannes; Beyer, Sven; Trentzsch, Martin; Seidel, Konrad; Eng, and Lukas M.
- 卷第10卷
- 期第2期
- 电子ISSN2079-4991
- 文件大小3544.88KB
- 发表时间2020-02-22
- DOI10.3390/nano10020384
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