Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas
- 期刊名称Journal of Vacuum Science & Technology B
- 作者Kim, Ju-Ho; Kwon, Deuk-Chul; Chung, Chin-Wook
- 卷第38卷
- 期第2期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小1377.08KB
- 发表时间2020-03
- DOI10.1116/1.5133978
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