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Atomic Layer Deposition of High-k Insulators on Epitaxial Graphene: A Review

Giannazzo, Filippo; SchilirÃ², Emanuela; Lo Nigro, Raffaella; Roccaforte, Fabrizio; Yakimova, Rositsa

期刊名称Applied Sciences
作者Giannazzo, Filippo; SchilirÃ², Emanuela; Lo Nigro, Raffaella; Roccaforte, Fabrizio; Yakimova, Rositsa
卷第10卷
期第7期
电子ISSN2076-3417
文件大小2617.61KB
发表时间2020-04-03
DOI10.3390/app10072440