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Systematic study of the etching characteristics of Si{111} in modified TMAH

Swarnalatha, Veerla; Pal, Prem; Pandey, Ashok Kumar; Narasimha Rao, Avvaru Venkata; Xing, Yan; Tanaka, Hiroshi; Sato, Kazuo

期刊名称Micro & Nano Letters
作者Swarnalatha, Veerla; Pal, Prem; Pandey, Ashok Kumar; Narasimha Rao, Avvaru Venkata; Xing, Yan; Tanaka, Hiroshi; Sato, Kazuo
卷第15卷
期第1期
电子ISSN1750-0443
文件大小744.00KB
发表时间2020-01-15
DOI10.1049/mnl.2019.0443
页码52-57