![SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Reflection, Scattering, and Diffraction from Surfaces III - Design of combined microscopical and scatterometrical imaging device of surface inspection]()
SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Reflection, Scattering, and Diffraction from Surfaces III - Design of combined microscopical and scatterometrical imaging device of surface inspectionZhao, Wenjing; Hahlweg, Cornelius; Rothe, Hendrik; Hanssen, Leonard M. · 2012