![SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - <title>Nano-film assisted anodic bonding</title>]()
SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - <title>Nano-film assisted anodic bonding</title>Wei, J.; Xie, H.; Wong, C. K.; Lee, L. C.; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro · 2002