![Automatic Focusing and Astigmatism Correction Method based on Fourier Transform of Scanning Electron Microscope Images]()
Automatic Focusing and Astigmatism Correction Method based on Fourier Transform of Scanning Electron Microscope ImagesOgasawara, Munehiro; Fukudome, Yuji; Hattori, Kiyoshi; Tamamushi, Shuichi; Koikari, Soshi; Onoguchi, Kazunori · Japanese Journal of Applied Physics · 1999