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Thermodynamic Calculation for the Vapor Growth of In
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As: The In-Ga-As-Cl-H System

Thermodynamic Calculation for the Vapor Growth of In _x Ga _{1-
x} As: The In-Ga-As-Cl-H System

Minagawa, Shigekazu; Seki, Hisashi; Eguchi, Hiroshi

期刊名称Japanese Journal of Applied Physics
作者Minagawa, Shigekazu; Seki, Hisashi; Eguchi, Hiroshi
卷第11卷
期第6期
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小499.23KB
发表时间1972-6
DOI10.1143/JJAP.11.855
页码855-859

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