Investigation of passivation mechanism in silicon surfaces by electron spin resonance
- 作者Ikuo Shiota; Nobuo Miyamoto; Jun-Ichi Nishizawa
- 卷第36卷
- 期第2期
- 文件大小985.33KB
- 发表时间1973
- DOI10.1016/0039-6028(73)90391-9
- 页码414-429
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