![SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Advances in Resist Technology and Processing IV - <title>New PCM (HR-PCM) Technique Using Novolak-Diazide Type Photoresist As A Bottom Layer</title>]()
SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Advances in Resist Technology and Processing IV - <title>New PCM (HR-PCM) Technique Using Novolak-Diazide Type Photoresist As A Bottom Layer</title>Yamashita, Yoshio; Jinbo, Hideyuki; Kawazu, Ryuji; Ohno, Seigo; Asano, Takateru; Kobayashi, Kenji; Nagamatsu, Gentaro; Bowden, Murrae J. · 1987