Preparation and Properties of SiO[sub 2] Films from SiH[sub 4]-CO[sub 2]-H[sub 2]
- 期刊名称Journal of The Electrochemical Society
- 作者Gaind, A. K.
- 卷第123卷
- 期第1期
- 印刷ISSN0013-4651
- 文件大小906.51KB
- 发表时间1976
- DOI10.1149/1.2132741
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