![Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature]()
Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperatureWorsley, Marcus A.; Bent, Stacey F.; Gates, Stephen M.; Fuller, Nicholas C. M.; Volksen, Willi; Steen, Michelle; Dalton, Timothy · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 2005