High pressure pumping speed measurement on sputter ion pumps
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Audi, M.
- 卷第3卷
- 期第3期
- 印刷ISSN0734-2101
- 文件大小489.53KB
- 发表时间1985-5
- DOI10.1116/1.573019
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