Material selection for hard coatings
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Holleck, H.
- 卷第4卷
- 期第6期
- 印刷ISSN0734-2101
- 文件大小861.67KB
- 发表时间1986-11
- DOI10.1116/1.573700
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