![[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Thermal Stability of Pt and C-Doped NiSi Films]()
[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Thermal Stability of Pt and C-Doped NiSi FilmsMachkaoutsan, V.; Pages, X.; Bauer, M.; Thomas, S.; Mertens, S.; Verheyden, K.; Vanormelingen, K.; Granneman, E. · 2007