![[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems. MEMS 2009 - Sorrento (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Sub-5μM Diameter Silicon Microprobe and Silicon Dioxide Microtube Arrays for Low-Invasive In-Vivo Animal Experiments]()
[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems. MEMS 2009 - Sorrento (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Sub-5μM Diameter Silicon Microprobe and Silicon Dioxide Microtube Arrays for Low-Invasive In-Vivo Animal ExperimentsTakei, K.; Kawano, T.; Kawashima, T.; Sawada, K.; Kaneko, H.; Ishida, M. · 2009