![A hybrid chemo-/grapho- epitaxial alignment strategy for defect reduction in sub-10 nm directed self-assembly of silicon-containing block copolymers]()
A hybrid chemo-/grapho- epitaxial alignment strategy for defect reduction in sub-10 nm directed self-assembly of silicon-containing block copolymersBlachut, Gregory; Sirard, Stephen M.; Maher, Michael J.; Asano, Yusuke; Someya, Yasunobu; Lane, Austin P.; Durand, William J.; Bates, Christopher M.; Dinhobl, Andrew M.; Gronheid, Roel; Hymes, Diane; Ellison, Christopher J; Willson, C. Grant · Chemistry of Materials · 2016