[IEEE 30th Annual Proceedings Reliability Physics 1992 - San Diego, CA, USA (1992.03.31-1992.04.2)] 30th Annual Proceedings Reliability Physics 1992 - Charge trapping/detrapping and dielectric breakdown in SiO/sub 2//Si/sub 3/N/sub 4//SiO/sub 2/ stacked layers on rugged poly-Si under dynamic stress
- 作者Lo, G.Q.; Ito, S.; Kwong, D.L.; Mathews, V.K.; Fazan, P.C.; Ditali, A.
- 文件大小524.50KB
- 发表时间1992
- DOI10.1109/relphy.1992.187620
- 页码42-48
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