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SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - <title>Smart-power metallization: issues, challenges, and opportunities (Abstract Only)</title>

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - Smart-power metallization: issues, challenges, and opportunities (Abstract Only)

Shenai, Krishna; Kwok, Thomas; Kikkawa, Takamaro; Shenai, Krishna
  • 作者Shenai, Krishna; Kwok, Thomas; Kikkawa, Takamaro; Shenai, Krishna
  • 卷第1805卷
  • 印刷ISSN0277-786X
  • 文件大小28.80KB
  • 发表时间1993
  • DOI10.1117/12.145458
  • 页码52-52
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