Role of silicon surface in the removal of point defects in ultrashallow junctions
- 期刊名称Applied Physics Letters
- 作者Sultan, A.; Banerjee, S.; List, S.; Rodder, M.
- 卷第69卷
- 期第15期
- 印刷ISSN0003-6951
- 文件大小557.83KB
- 发表时间1996
- DOI10.1063/1.117136
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