[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Bernas source for the Precision Implant 9200
- 作者Vella, M.C.; Hacker, W.; Price, S.W.; Reilly, T.
- 文件大小177.16KB
- 发表时间1997
- DOI10.1109/iit.1996.586363
- 页码394-395
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