Axial Dependence of Electron Energy Distribution in Symmetrically RF Ar Discharges
- 期刊名称Japanese Journal of Applied Physics
- 作者Kimura, Takashi; Kaga, Kouji; Ohe, Kazuyuki
- 卷第36卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小138.08KB
- 发表时间1997-4-15
- DOI10.1143/JJAP.36.2336
- 页码2336-2339
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