![Preparation and Characterization of Epitaxial Lead Zirconate Titanate Films on Pt/(Ti, Al)N/TiN/Si Substrates by Metalorganic Chemical Vapor Deposition]()
Preparation and Characterization of Epitaxial Lead Zirconate Titanate Films on Pt/(Ti, Al)N/TiN/Si Substrates by Metalorganic Chemical Vapor DepositionSakurai, Atsushi; Li, Xio Min; Shiratsuyu, Kohsuke; Tanaka, Katsuhiko; Sakabe, Yukio · Japanese Journal of Applied Physics · 2000