Preparation and Characterization of Epitaxial Lead Zirconate Titanate Films on Pt/(Ti, Al)N/TiN/Si Substrates by Metalorganic Chemical Vapor Deposition
- 期刊名称Japanese Journal of Applied Physics
- 作者Sakurai, Atsushi; Li, Xio Min; Shiratsuyu, Kohsuke; Tanaka, Katsuhiko; Sakabe, Yukio
- 卷第39卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小818.16KB
- 发表时间2000-9-30
- DOI10.1143/JJAP.39.5441
- 页码5441-5445
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