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[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Pressure based mass flow control for ion implant SDS applications

[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Pressure based mass flow control for ion implant SDS applications

Brown, R.L.; Schwartz, J.M.

作者Brown, R.L.; Schwartz, J.M.
卷第1卷
文件大小430.93KB
发表时间1998
DOI10.1109/iit.1999.812130
页码369-372

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