Photonic Bandgap Formation by Wafer Bonding and Delamination
Wada, Kazumi; Chen, Thomas; Michel, Jurgen; Kimerling, Lionel C.; Aga, Hiroshi; Mitani, Kiyoshi; Abe, Takao; Suezawa, Masashi
- 期刊名称MRS Proceedings
- 作者Wada, Kazumi; Chen, Thomas; Michel, Jurgen; Kimerling, Lionel C.; Aga, Hiroshi; Mitani, Kiyoshi; Abe, Takao; Suezawa, Masashi
- 卷第535卷
- 电子ISSN1946-4274
- 文件大小2254.98KB
- 发表时间1998-1
- DOI10.1557/proc-535-121