![Fabrication of Submicron Grating Patterns Usinc Compositional Disordering of AlGaAs-GaAs Superlattices by Focused Si Ion Beam Implantation]()
Fabrication of Submicron Grating Patterns Usinc Compositional Disordering of AlGaAs-GaAs Superlattices by Focused Si Ion Beam ImplantationIshida, Koji; Miyauchi, Eizo; Morita, Tetsuo; Takamori, Takeshi; Fukunaga, Toshiaki; Hashimoto, Hisao; Nakashima, Hisao · Japanese Journal of Applied Physics · 1987