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Limitations of conductance to the measurement of the interface state density of MOS capacitors with tunneling gate dielectrics

Limitations of conductance to the measurement of the interface state density of MOS capacitors with tunneling gate dielectrics

Vogel, E.M.; Henson, W.K.; Richter, C.A.; Suehle, J.S.
  • 作者Vogel, E.M.; Henson, W.K.; Richter, C.A.; Suehle, J.S.
  • 卷第47卷
  • 期第3期
  • 印刷ISSN0018-9383
  • 电子ISSN1557-9646
  • 文件大小200.56KB
  • 发表时间2000
  • DOI10.1109/16.824736
  • 页码601-608
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