Ion Implantation for Silicon Carbide Electronic Devices
- 期刊名称MRS Proceedings
- 作者Capano, Michael A.
- 卷第640卷
- 电子ISSN1946-4274
- 文件大小280.12KB
- 发表时间2000-1
- DOI10.1557/proc-640-h6.1
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