Processing, microstructure and properties of chemical vapour deposited TiN/AIN films
- 期刊名称International Journal of Materials and Product Technology
- 作者Yoshikawa, Noboru; Aoki, Masato; Kikuchi, Atsushi; Taniguchi, Shoji
- 卷第16卷
- 印刷ISSN0268-1900
- 电子ISSN1741-5209
- 文件大小1435.55KB
- 发表时间2001
- DOI10.1504/ijmpt.2001.005402
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