Electroplated Ni microcantilever probe with electrostatic actuationToshihiro Itoh; Shingo Kawamura; Kenichi Kataoka; Tadatomo Suga · 2005

Electroplating Ni micro-cantilevers for low contact-force IC probingKenichi Kataoka; Shingo Kawamura; Toshihiro Itoh; Kaoru Ishikawa; Hideo Honma; Tadatomo Suga · 2003

[IEEE Electrical Contacts - 2007 Proceedings of the 53rd IEEE Holm Conference on Electrical Contacts - (2007.09.16-2007.09.19)] Electrical Contacts - 2007 Proceedings of the 53rd IEEE Holm Conference on Electrical Contacts - Fritting Contact Using SnAu probeKataoka, Kenichi; Inoue, Kazuhiro; Itoh, Toshihiro; Suga, Tadatomo · 2007

[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Microstructure Fabrication with Conductive Paste DispensingItoh, Toshihiro; Suga, Tadatomo; Kataoka, Kenichi; Sano, Toshio · 2007

SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - <title>MEMS IC test probe utilizing fritting contacts</title>Itoh, Toshihiro; Kataoka, Kenichi; Engelmann, Gunter; Wolf, Juergen; Ehrmann, Oswin; Reichl, Herbert; Suga, Tadatomo; Courtois, Bernard; Crary, Selden B.; Gabriel, Kaigham J.; Karam, Jean Michel; Markus, Karen W.; Tay, Andrew A. O. · 2000

[IEEE Electrical Contacts - 2006. 52nd IEEE Holm Conference on Electrical Contacts - Montreal, QC, Canada (2006.09.25-2006.09.27)] Electrical Contacts - 2006. Proceedings of the 52nd IEEE Holm Conference on Electrical Contacts - Mechanism of ultra low force probing on Al electrodesKataoka, Kenichi; Itoh, Toshihiro; Suga, Tadatomo · 2006