![Fluorine incorporated amorphous carbon thin films prepared by Surface Wave Microwave Plasma CVD]()
Fluorine incorporated amorphous carbon thin films prepared by Surface Wave Microwave Plasma CVDKalita, Golap; Aryal, Hare Ram; Adhikari, Sudip; Ghimire, Dilip C.; Afre, Rakesh A.; Soga, Tetsuo; Sharon, Maheshwar; Umeno, Masayoshi · Diamond and Related Materials · 2008