SiGe/Si microtubes fabricated on a silicon-on-insulator substrate
- 作者A. Vorob'ev; P. O. Vaccaro; K. Kubota; T. Aida; T. Tokuda; T. Hayashi; Y. Sakano; J. Ohta; M. Nunoshita
- 文件大小326.36KB
- 发表时间2003
- DOI10.1088/0022-3727/36/17/102
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