![SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MOEMS Display and Imaging Systems II - <title>Application of spatial light modulators for microlithography</title>]()
SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MOEMS Display and Imaging Systems II - <title>Application of spatial light modulators for microlithography</title>Dauderstaedt, Ulrike A.; Duerr, Peter; Karlin, Tord; Schenk, Harald; Lakner, Hubert; Urey, Hakan; Dickensheets, David L. · 2004