Effect of silicon doping on the mechanical and optical properties of carbon nitride thin films
- 作者D. Sarangi; R. Sanjinés; A. Karimi
- 印刷ISSN0040-6090
- 文件大小545.00KB
- 发表时间2004
- DOI10.1016/s0040-6090(03)01054-x
- 页码217-222
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