![[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - CMOS micromechanical bandpass filter design using a hierarchical MEMS circuit library]()
[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - CMOS micromechanical bandpass filter design using a hierarchical MEMS circuit libraryJing, Q.; Luo, H.; Mukherjee, T.; Carley, L.R.; Fedder, G.K. · 2000