![[IEEE 2010 IEEE International Conference on Semiconductor Electronics (ICSE) - Malacca, Malaysia (2010.06.28-2010.06.30)] 2010 IEEE International Conference on Semiconductor Electronics (ICSE2010) - Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity]()
[IEEE 2010 IEEE International Conference on Semiconductor Electronics (ICSE) - Malacca, Malaysia (2010.06.28-2010.06.30)] 2010 IEEE International Conference on Semiconductor Electronics (ICSE2010) - Optimum design of SU-8 based accelerometer with reduced cross axis sensitivityRay, Prasenjit; Rao, V. Ramgopal; Apte, Prakash R. · 2010